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Continue to ChatA folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer - https://avesis.hacettepe.edu.tr/yayin/627fa9d2-276e-4857-bc18-3e1abbe61c2e/a-folded-leg-ka-band-rf-mems-shunt-switch-with-amorphous-silicon-a-si-sacrificial-layer